Micro-machining employing multiple independently focused and independently steered beams

ABSTRACT

A system for delivering energy to a substrate includes a laser energy source providing at least two laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.

This is a divisional of application Ser. No. 10/742,838 filed Dec. 23,2003 which is a continuation of application Ser. No. 10/660,730 filedSep. 12, 2003. The entire disclosure of the prior application,application Ser. No. 10/742,838 is considered part of the disclosure ofthis divisional application and is hereby incorporated by reference.

FIELD OF THE INVENTION

The present invention generally relates to multiple laser beampositioning and energy deliver systems, and more particularly to lasermicro-machining systems employed to form holes in electrical circuitsubstrates.

BACKGROUND OF THE INVENTION

Various laser systems are employed to micro-machine and otherwisethermally process substrates. Conventional laser systems employ focusingoptics positioned between a beam steering device and a substrate tofocus the beam onto the substrate.

A laser micro-machining device employing multiple independentlypositionable laser beams is described in copending U.S. patentapplication Ser. No. 10/170,212, filed Jun. 13, 2002 and entitled“Multiple Beam Micro-Machining System and Method”, the disclosure ofwhich is incorporated by reference in its entirety.

A laser device employing multiple independently positionable laser beamsfor thermally treating thin film materials, for example thin films onflat panel display substrates, is described in copending PCT applicationPCT/IL03/00142, filed Feb. 24, 2003 and entitled “Method forManufacturing Flat Panel Display Substrates”, the disclosure of which isincorporated by reference in its entirety.

SUMMARY OF INVENTION

The present invention seeks to provide an improved multiple beam laserbeam energy delivery system, for simultaneously delivering multiplebeams of focused laser energy to a substrate, that avoids the use of anf-θ scan lens.

The present invention further seeks to provide an improved multiple beamlaser beam energy delivery system, for simultaneously deliveringmultiple beams of focused laser energy to a substrate, that avoidsfocusing optics situated between a beam steering device and thesubstrate.

The present invention still further seeks to provide an improvedmultiple beam laser beam energy delivery system, for delivering multiplebeams of laser energy to a substrate, that independently focuses each ofthe multiple laser beams. In accordance with an embodiment of theinvention, each of the multiple laser beams is independently focusedupstream of a beam steering assembly.

The present invention still further seeks to provide an integratedmultiple laser beam energy delivery system, for delivering multiplebeams of laser energy to a substrate, operative to independently steereach of the laser beams, and to independently focus each of the laserbeams in coordination with the beam steering.

The present invention still further seeks to provide a multiple laserbeam laser energy delivery system operative to deliver laser energy toindependently selectable locations on a workpiece, the device having anarray of beam steering modules located downstream of beam focusingoptics. In accordance with an embodiment of the present invention, thebeam focusing optics are operative to independently focus each of themultiple laser beams onto a selectable location.

The present invention still further seeks to provide a multiple laserbeam energy delivery system, for delivering multiple beams of laserenergy to a workpiece, having a redundant number of independent focusingmodules relative to a number of laser beams. The system is operative touse some focusing modules to deliver focused laser beams to a first setof locations on the substrate and to simultaneously move other focusingmodules into focus to subsequently deliver focused laser beams to asecond set of locations on the substrate. In accordance with anembodiment of the invention, the time required to move a focusing moduleinto focus is greater than the time required to select a focusingmodule. The time required to switch between focusing modules is lessthan the time interval between adjacent pulses.

The present invention still further seeks to provide an improvedmultiple beam laser beam energy delivery system, for delivering multiplebeams of laser energy to a workpiece, that includes a quantity laserbeam focusing modules that is greater than the quantity of laser beams,and a beam director that is used to direct each beam to a selectablefocusing module. While delivering focused laser energy to a first set ofselectable locations on a substrate via a first set of laser beamfocusing modules, other laser beam focusing modules are moved into focusfor later delivery of focused laser energy to a next different ofselectable locations.

There is thus provided in accordance with an embodiment of the presentinvention and apparatus and method for delivering laser energy to aworkpiece, including at least one laser energy source providing at leastone laser beam; and a plurality of laser beam modules arranged toselectably steer the at least one laser beam to a plurality of targetsub-areas on a workpiece, which together cover a target area, theplurality of laser beam modules being additionally operative to focusthe at least one laser beam on the workpiece without an interveningf-theta lens.

There is thus provided in accordance with another embodiment of thepresent invention an apparatus and method for delivering laser energy toa workpiece, including at least one pulsed laser energy source operatingat a pulse repetition rate and providing at least one pulsed laser beam;and a plurality of laser beam focusing optical modules arranged toselectably focus each of the at least one laser beam to a selectedlocation on a workpiece, the plurality of laser beam focusing opticalmodules being of a number greater than the at least one laser beam,thereby to define at least one redundant laser beam focusing opticalmodule.

There is thus provided in accordance with still another embodiment ofthe present invention an apparatus and method for delivering laserenergy to a workpiece, including at least one laser energy sourceproviding at least one laser beam; a plurality of laser beam steeringmodules arranged to selectably steer the at least one laser beam toselectable locations on a target; and a plurality of laser beam focusingoptical modules associated with the laser beam steering modules forfocusing a laser beam onto the workpiece.

There is thus provided in accordance with still another embodiment ofthe present invention an apparatus and method for delivering laserenergy to workpiece, including a laser energy source providing at leasttwo laser beams for delivering laser energy to a workpiece at least attwo different locations; at least two optical elements receiving the atleast two laser beams, the at least two optical elements being operativeto simultaneously independently control a beam parameter of each of theat least two laser beams; and a laser beam steering assembly receivingthe at least two laser beams and being operative to independently steerthe at least two laser beams to independently selectable locations on anin-fabrication electrical circuit.

There is thus provided in accordance with still another embodiment ofthe present invention an apparatus and method for delivering laserenergy to an electrical circuit substrate, including at least one laserbeam source simultaneously outputting a plurality of laser beams; aplurality of independently steerable laser beam deflectors disposedbetween the at least one laser beam source and the electrical circuitsubstrate to direct the plurality of laser beams to impinge on theelectrical circuit substrate at independently selectable locations; andfocusing optics operative to focus the plurality of laser beams todifferent independently selectable locations without f-θ opticalelements.

There is thus provided in accordance with still another embodiment ofthe present invention an apparatus and method for delivering laserenergy to a substrate including: at least one pulsed laser energy sourceproviding at least one pulsed laser beam; a plurality of laser beamsteering modules arranged to selectably steer the at least one laserbeam to selected locations on a target at differing focal lengths, theplurality of laser beam steering modules being of a number greater thanthe at least one laser beam, thereby to define at least one redundantbeam steering module; a plurality of laser beam automatic focusingoptical modules upstream of the plurality of laser beam steering modulesfor automatically focusing a laser beam passing therethrough to acorresponding laser beam director module, to compensate for thediffering focal lengths, the plurality of laser beam automatic focusingoptical being of a number greater than the at least one laser beam,thereby to define at least one redundant laser beam automatic focusingoptical module, the redundancy in the plurality of laser beam directormodules and the plurality of laser beam automatic focusing opticalmodules compensating for a difference between a pulse repetition rate ofthe at least one pulsed laser energy source and a cycle time of theautomatic focusing optical module.

Various embodiments of the invention include one or more of thefollowing features and characteristics. It is noted, however, that someof the following components, features and characteristics may be foundalone or in combination with other features and characteristics; some ofthe following components, features and characteristics refine others;and the implementation of some of the following components, features andcharacteristics excludes implementation of other components, featuresand characteristics.

A laser energy source comprises a laser and a laser beam splitteroperative to convert an output of the laser into a plurality of laserbeams.

A laser energy source comprises a laser and a laser beam directoroperative to receive an output of the laser and to provide a pluralityof individually directed laser beams.

A beam splitter is operative to receive a laser beam and to output eachof at least two laser beams in independently selectable directions.

A laser energy source comprises a laser and an AOD (acousto-opticaldevice) operative to split an output of the laser into a selectablenumber of laser beams and to individually direct each laser beam to aselectable location.

Laser beam modules comprise at least one laser beam steering moduleoperative to steer at least one laser beam to a selectable location onthe workpiece, and at least one laser beam focusing optical moduleupstream of the at least one laser beam steering module operative tofocus the at least one laser beam onto the workpiece.

Optionally, laser beam modules comprise at least one laser beam steeringmodule operative to steer at least one laser beam to a selectablelocation on the workpiece and to selectively extend or retract tocompensate for an actual distance to the selectable location to therebydeliver the at least one laser beam in focus onto the workpiece.

Laser beam modules comprise a plurality of laser beam steering modulesarranged in an array, each laser beam steering module being operative tosteer a laser beam to a selectable location in a corresponding targetsub-area.

Each laser beam steering module is operative to steer a laser beam to aselectable location independent of other laser beam steering modules.

Laser beam focusing optical modules operate in coordination with acorresponding laser beam steering module, the focusing optical modulesbeing operative to focus a laser beam onto the workpiece at a selectablelocation.

Laser beam modules comprise a plurality of laser beam steering modulesand a corresponding plurality of laser beam focusing optical modules.Each laser beam focusing optical module is operative to focus a laserbeam to any selectable location in a target sub-area.

The laser beam modules include at least one redundant laser beam module.

The laser beam is a pulsed laser beam. During an initial pulse, a firstlaser beam steering module is operative to steer a laser beam in focusto a first selectable location. During a subsequent pulse, a secondlaser beam steering module is operative to steer at least one laser beamin focus to a second selectable location different from the firstselectable location.

A laser beam steering module is arranged to selectably steer a laserbeam to a selectable location in a target sub-area. At least someselectable locations in the target sub-area are located at differingfocusing distances from a corresponding focusing optical module.Focusing is achieved by dynamically changing a focus parameter of thefocusing optical module.

A laser beam can be selectably directed to a selectable laser beamfocusing optical module. A redundancy in the laser beam focusing opticalmodules respective of the laser beams compensates for a differencebetween the pulse repetition rate and a cycle time of each of the laserbeam focusing optical modules.

During a first pulse of the pulsed laser energy source, a first laserbeam focusing optical module is operative to focus a first pulsed laserbeam onto a workpiece.

During a first pulse of the pulsed laser source, a redundant laser beamfocusing optical module is repositioned to a position required to focusa subsequent pulsed laser beam onto the workpiece at a subsequentselectable location, the subsequent pulsed laser beam being outputduring a subsequent pulse of the pulsed laser energy source.

A pulsed laser energy source is operative to provide a plurality ofpulsed laser beams during each pulse.

A pulsed laser energy source is operative to provide a plurality ofpulsed laser beams for each pulse, and the plurality of laser beamfocusing optical modules includes an at least one redundant laser beamfocusing optical module respective of each laser beam.

A cycle time for configuring a laser beam focusing optical module tofocus a laser beam onto the workpiece exceeds a time interval separatingpulses of the at least one pulsed laser source.

A pulsed laser energy source comprises a deflector selectably deflectingthe at least one pulsed laser beam. A cycle time of the deflector isless than a time interval between pulses of the pulsed laser source.

During an initial pulse of the pulsed laser energy source the deflectoris operative to deflect an initial laser beam to a first laser beamfocusing optical module, and during a next pulse the deflector isoperative to deflect a next laser output to a redundant laser beamfocusing optical module.

A plurality of laser beam steering modules is provided downstream of theplurality of laser beam focusing optical modules for steering a laserbeam to a selectable location on the workpiece.

Laser beam focusing modules include a selectively pivoting mirroroperative to be extended or retracted to compensate for changes indistance to a flat surface resulting from a pivoting action.

A laser beam focusing module comprises at least one actuator operativeto move a portion of the laser beam steering module to compensate forchanges in a length of an optical path as a function of steering the atleast one laser beam.

A pulsed laser comprises a Q-switched pulsed laser.

A pulsed laser outputs a laser beam in the ultra-violet spectrum.

A laser beam steering assembly comprises a plurality of laser beamsteering modules. The laser beam steering modules is arranged in a twodimensional array of laser beam steering modules.

A focusing assembly comprises at least two dynamically movable opticalelements arranged in an array of lens modules.

A changeable beam parameter is a focus parameter. Focusing modules areoperative to simultaneously independently focus at least two laser beamsat respective independently selectable locations. The at least two laserbeams are derived from the same laser beam source.

An array of focusing modules is disposed between the laser beam sourceand a laser beam steering assembly.

A focusing module comprises at least one lens element beingindependently movable respective of a movable lens element in anotherfocusing module.

A controller is operative to independently move movable lens elements toindependently focus at least two laser beams at respective independentlyselectable locations.

A zoom lens element is operative to receive at least two laser beams andto change a beam diameter property of the laser beams.

A laser beam is deliverable in focus to an independently selectablelocation among a plurality of selectable locations within a targetsub-area. At least some of the independently selectable locations havedifferent focus parameters. Focus is achieved by independentlydynamically focusing each of the beams.

Focusing modules are operative to focus each laser beams at anindependently selectable location as a function of a correspondingfocusing distance.

A beam steering assembly comprises at least two actuators each coupledto a reflector to independently pivot each reflector. The actuators arefurther operative to extend or retract each reflector to independentlyadjust a beam focus parameter of the at least two laser beams.

The laser beams are operative to deliver laser energy to generate a viahole in an in-fabrication electrical circuit.

The laser beams are operative to deliver laser energy to trim a passiveelectrical component in an in-fabrication electrical circuit.

An in-fabrication electrical circuit is an in-fabrication printedcircuit board, in-fabrication integrated circuit, an in-fabrication flatpanel display.

The laser beams are operative to deliver laser energy to anneal siliconin an in-fabrication electrical circuit, such as an in-fabrication flatpanel display.

The laser beams are operative to deliver laser energy to facilitate ionimplantation in an in-fabrication electrical circuit, such asin-fabrication integrated circuit or in-fabrication flat panel display.

There is thus provided in accordance with still another embodiment ofthe present invention an apparatus and method for dynamically splittinga laser beam, including a beam deflector having a plurality of operativeregions, the beam deflector being operative to receive a laser beam at afirst one of the plurality of operative regions and to provide aselectable number of output beam segments in response to a control inputsignal.

There is thus provided in accordance with still another embodiment ofthe present invention an apparatus and method for dynamically deflectinga laser beam, including a beam deflector element having a plurality ofoperative regions, the beam deflector element being operative to receivean input laser beam at a first one of the plurality of operative regionsand to provide a plurality of output beam segments output at least fromone additional operative region, at least one output beam beingindependently deflected in response to a first control input signal.

There is thus provided in accordance with still another embodiment ofthe present invention an apparatus and method for dynamically splittinga laser beam, including a beam deflector having a plurality of operativeregions being operative to receive a laser beam at a first one of theoperative regions; and further being responsive to a control inputsignal to generate a selectable number of output beam segments, at leastone output beam being output from a second operative region.

Various embodiments of these aspects of the invention include one ormore of the following features and characteristics. It is noted,however, that some of the following components, features andcharacteristics may be found alone or in combination with other featuresand characteristics; some of the following components, features andcharacteristics refine others; and the implementation of some of thefollowing components, features and characteristics excludesimplementation of other components, features and characteristics.

A control input signal controlling the beam splitter/deflector comprisesa sequence of pulses, each of the pulses controlling a respective outputbeam segments.

Each of the output beams has an energy parameter that is controlled by acharacteristic of the control input signal.

Each of the output beam segments is deflected by a respective deflectionangle that is controlled by a characteristic of a pulse in the controlinput signal.

Each of the output beam segments has substantially the same crosssectional configuration, irrespective of the selectable number of outputbeam segments.

The selectable number of output beam segments have a controllable energyparameter. The energy parameter is an energy density or fluence.

The energy densities among output beam segments is selectable to besubstantially uniform. Optionally, it is selectable to be substantiallynot uniform.

The beam deflector is operative to direct the output beam segments inrespective selectable directions responsive to the control input signal.

The beam deflector comprises an acousto-optic deflector, and atransducer to generate acoustic waves in the acousto-optic deflector inresponse to the control input signal. The deflector diffracts the laserbeam at each of several operative regions as a function of the acousticwave formed by the control input signal.

A beam redirector is operative to receive an output beam segmentdirected in a second direction from a first one of the plurality ofoperative regions and to direct the output beam segment to second onesof the plurality of operative regions.

A beam redirector comprises a first mirror having a plurality ofregions, each region passing to the operative regions of a beamsplitter/deflector a portion of a redirected beam and reflecting to aparallel mirror a remaining portion of the redirected beam.

Beam segments output by the beam reflector/deflector are mutuallynon-parallel.

An input laser beam has a spatial cross-section in the first one of theplurality of operative regions. A beam redirector comprises correctionoptics, which operate on redirected output beam segment so that thespatial cross section of the redirected output beam segment issubstantially similar to the spatial cross section of the input beam.

A control input signal has a frequency characteristic, which controlsthe beam direction, and an amplitude characteristic, which controls anenergy parameter of an output beam.

Each of the above devices and methods may be employed as part of processfor manufacturing electrical circuits in which laser energy is deliveredto an electrical circuit substrate, for example to ablate a material ata selected location, or as part of an annealing or ion implantationprocess. An additional electrical circuit manufacturing operation, suchas, but not limited to, an additional photolithography, etching or metaldeposition process, typically is performed on the electrical circuitsubstrate.

BRIEF DESCRIPTION OF DRAWINGS

The present invention will be understood and appreciated more fully fromthe following detailed description, taken in conjunction with thedrawings in which:

FIG. 1A is a simplified partially pictorial, partially block diagram,illustration of apparatus for fabricating electrical circuitsconstructed and operative in accordance with a preferred embodiment ofthe present invention;

FIG. 1B is a timing graph of laser pulses output by a laser used in thesystem and functionality of FIG. 1;

FIGS. 2A-2C are simplified side view illustrations showing operation ofa portion of the apparatus of FIG. 1A in three different operativeorientations;

FIGS. 3A-3C are simplified schematic illustrations of an AOD suitablefor use in the system of FIG. 1 in accordance with an embodiment of theinvention; and

FIG. 4 is a flow diagram of a method for manufacturing electricalcircuits in accordance with an embodiment of the invention.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Reference is now made to FIG. 1A, which is a simplified partiallypictorial, partially block diagram, illustration of a system andfunctionality for fabricating an electrical circuit, constructed andoperative in accordance with a preferred embodiment of the presentinvention, and to FIG. 1B which is a timing graph of laser pulses outputby a laser used in the system and functionality of FIG. 1A. The systemseen in FIG. 1A includes laser micro-machining apparatus 10, which ingeneral terms is operative to simultaneously deliver multiple beams ofenergy to a workpiece, such as an electrical circuit substrate.

Apparatus 10 is particularly useful in the context of micro-machiningholes, such as vias 12, at locations 13, in printed circuit boardsubstrates 14, during the fabrication of printed circuit boards.Apparatus 10 may be adapted without departing from the presentlydescribed invention for use in other suitable fabrication processesemploying micro-machining or heat treating of substrates. Theseprocesses include, without limitation, the selective annealing ofamorphous silicon in flat panel displays, selective laser assisteddoping of semiconductor transistors such as thin film transistors onflat panel displays, the removal of solder masks from electricalcircuits, and the trimming of passive electronic components, such asimbedded resistors in printed circuit boards and bumps on ball gridarray substrates and “flip-chip” type semiconductor circuits.Accordingly, although the invention is described in the context ofmicro-machining printed circuit boards, the scope of the inventionshould not be limited solely to this application.

Printed circuit board substrates, such as a substrate 14, which aresuitable to be micro-machined using systems and methods describedhereinbelow, typically include dielectric substrates, for example epoxyglass, having one or more electrical circuit layers. Typically, aconductor pattern 16 is selectively formed on each electrical circuitlayer. The substrates may be formed of a single layer or, in thealternative, of a laminate including several substrate layers adheredtogether. Additionally, the outermost layer of the substrate 14 maycomprise the conductor pattern 16 formed thereon, as seen in FIG. 1A.Alternatively, the outermost layer of substrate 14 may comprise, forexample, a metal foil substantially overlaying a continuous portion ofthe outer surface of the substrate 14, for example as shown by theregion indicated by reference numeral 17. In the context of otherrelated applications, substrate 14 may be, for example, anin-fabrication flat panel display.

In accordance with an embodiment of the invention, as seen in FIG. 1A,laser micro-machining apparatus 10 includes a pulsed laser 20 outputtinga pulsed laser beam 22. Pulsed laser beam 22 is defined by a stream oflight pulses, schematically indicated by peaks 24 and 25 in laser pulsegraph 26 (FIG. 1B). In accordance with an embodiment of the inventionpulsed laser 20 is a frequency tripled Q-switched YAG laser providing apulsed a UV laser beam 22 at a pulse repetition rate of between about10-100 KHz, and preferably at about 10-30 KHz. Suitable Q-switchedlasers are presently available, for example, from Spectra Physics,Lightwave Electronics and Coherent, Inc. all of California, U.S.A. Othercommercially available pulsed lasers, that suitably interact withtypical materials employed to manufacture printed circuit boards, mayalso be used.

Another suitable laser for use as pulsed laser 20, operative to output apulsed UV laser beam particularly suitable for micro-machiningsubstrates containing glass, is described in the present Applicants'copending U.S. patent application Ser. No. 10/167,472, the disclosure ofwhich is incorporated by reference in its entirety.

In the embodiment seen in FIG. 1A, pulsed laser beam 22 impinges on afirst lens 28, such as a cylindrical lens, operative to flatten beam 22into a narrow beam 23 having a waist which is delivered to an imageplane (not seen) in a first variable deflector assembly, such as anacousto-optical deflector (AOD) 30. Preferably AOD 30 includes atransducer element 32 and a translucent crystal member 34 formed ofquartz or other suitable crystalline material.

It is noted that various design details of micro-machining apparatus 10seen in FIG. 1A, which are well within the competence of a skilledoptical designer, are omitted in an effort to maintain clarity and avoidobscuring key teaching points of the invention. For example, variouslenses and optical paths are not drawn to scale. Moreover, some lenses,for example (but not limited to) lens 28, include several separate lenselements which are not shown. Likewise beam stabilization means withinthe competence of a skilled optical designer, as typically would berequired in a complex laser energy delivery system, are omitted from thedrawings to maintain clarity and avoid obscuring key teaching points ofthe invention.

Returning now to FIG. 1A, transducer 32 receives a control signal 36 andgenerates an acoustic wave 38 that propagates through crystal member 34of AOD 30. Control signal 36 preferably is an RF signal provided by anRF modulator 40, preferably driven by a direct digital synthesizer (DDS)42, or other suitable signal generator, for example a voltage controlledoscillator (VCO). A system controller 44, in operative communicationwith DDS 42 and a laser driver (not shown), is provided to coordinatebetween generation of the control signal 36 and laser pulses 24 definingpulsed laser beam 22 so that portions of substrate 14 are removed, e.g.by ablation, in accordance with a desired design pattern of anelectrical circuit to be manufactured. Such design pattern may beprovided, for example, by a CAD or CAM (computer aided design orcomputer aided manufacture) data file 46 or other suitable computer filerepresentation of an electrical circuit to be manufactured.

In some applications, pulsed laser beam 24 is delivered to substrate 14to heat portions of the substrate without ablation, for example for usein laser assisted annealing of amorphous silicon or laser assisted ionimplantation in thin film transistors, for example as described inApplicants' copending U.S. patent application Ser. No. 10/170,212, filedJun. 13, 2002 and entitled “Multiple Beam Micro-Machining System andMethod”, and copending PCT application PCT/IL03/00142, filed Feb. 24,2003 and entitled “Method for Manufacturing Flat Panel DisplaySubstrates”, the disclosures of which are incorporated by reference intheir entirety.

As known in the art, presence of the acoustic wave 38 in crystal member34, when beam 23 impinges thereon, causes beam 23 to be deflected at anangle θ _(n) , relative to an axis incidental with an axis of an inputbeam, which is a function of the frequency ƒ_(n) of wave 38, accordingto the formula:$\theta_{n} = \frac{\Delta\quad f_{n} \times \lambda}{\upsilon_{s}}$Where:Δƒ_(n)=ƒ_(n)−ƒ₀;

-   -   λ=wavelength of beam 22;    -   ν_(s)=speed of sound in the crystal 34 of AOD 30, and    -   n is an integer representing the index number of a laser        sub-beam, as described hereinbelow.

In accordance with an embodiment of the invention, AOD 30 is operativeto function as a dynamic beam splitter and beam deflector which governsat least one of: a number segments into which beam 23 is split and anangle of deflection of each segment. Signal 36 may be selectablyprovided so as to cause acoustic wave 38 to propagate at a uniformfrequency through an active portion of crystal member 34. Alternatively,signal 36 may be selectably provided so as to cause the acoustic wave 38to propagate with different frequencies in the active portion of crystalmember 34.

In accordance with an embodiment of the invention, signal 36 causes theacoustic wave 38 to be generated in AOD 30 with different frequenciessuch that at a moment in time at which the acoustic wave 38 interactswith a laser pulse 24 in laser beam 23, the acoustic wave 38 comprisesat least two different frequency components. These components mayconstitute, for example at least two different superimposed frequencies,or two spatially separated regions each with the same frequency. Bygenerating an acoustic wave 38 with more than one frequency component,segmentation of beam 23 and the respective directions at which eachsegment is output from the AOD 30 are controlled. Typically, signal 36comprises a sequence of pulses 37 which are timed so that the resultingdifferent frequency components in acoustic wave 38 are spatiallyseparated in AOD 30 at the moment at which a laser pulse 24 or 25 inbeam 23 impinges thereon. Alternatively, the different frequencies aresuperimposed in a complex waveform having spatially overlappingfrequency components (not shown).

In accordance with an embodiment of the invention, the acoustic wave 38is propagated through crystal member 34 in a non-uniform waveform andinteracts with the laser beam 23 so that beam 23 is segmented into atleast two beam segments 50, or sub-beams.

Beam segments 50 are depicted in FIG. 1A as being solid lines. As willbe described in greater detail hereinbelow, beam segments 50 maypropagate along any of several different beam paths, designated beampaths 51. Paths that are not occupied by a beam segment 50 are depictedin FIG. 1A as dotted lines. Each of the beam segments 50 preferably isindependently deflected at an angle θ_(n) which is a function of anacoustic wave frequency, or frequencies, of the acoustic wave 38 incrystal member 34 at the time a pulse in the laser beam 23 impingesthereon.

Each of beam segments 50, whether a single segment, provided e.g. by anacoustic wave having only one frequency, or several segments as seen inFIG. 1A provided e.g. by an acoustic wave having several differentfrequencies along its length, is directed to impinge on a variabledeflector assembly 52. The variable deflector assembly 52 comprises anarray of beam steering modules 54. Each module includes an independentlytiltable reflector element 56 and an actuator 58 operative toindependently tilt each reflector element 56 into a desired spatialorientation to steer a beam impinging thereupon to a selectable locationon substrate 14.

In accordance with an embodiment of the invention, the variabledeflector assembly 52 comprises an optical MEMs device, or is formed asan array of mirrors tiltable by suitable piezo-electric motors, or isformed as an array of galvanometers, or comprises any other suitablearray of independently tiltable reflector devices. In the exampleconfiguration of the variable deflector assembly 52 seen in FIG. 1A, a4×5 array of piezo-electric activated beam steering modules 54 isprovided. Any other array, including a suitable quantity ofindependently tiltable steering modules 54, may be used.

As seen in FIG. 1A, the operation of each beam steering modules 54 isindependently controlled, for example, by a servo controller 60 inoperative communication with system controller 44. Each beam steeringmodule 54 suitably steers a corresponding beam segment 50 to impinge onsubstrate 14 at a required location 13, in accordance with a desireddesign pattern of an electrical circuit to be manufactured. Such designpattern may be provided, for example, by the CAM data file 46 or othersuitable computer file representation of an electrical circuit to bemanufactured.

Progressing now along the optical path downstream of AOD 30, it is seenin FIG. 1A that beam segments 50 are output from AOD 30 such that theylie in a plane, which is oriented relative to the optical axis of theincoming beam 23. The angles θ_(n) at which beam segments 50 aredeflected by AOD 30 typically are very small relative to the opticalaxis of the incoming beam 23, in the order of 10⁻² radians. In order toprovide for a more compact system, a beam angle expander, such as one ormore telescoping optical elements, schematically represented by lens 60,operative to increase a separation between beam segments 50, is provideddownstream of AOD 30.

A linear to 2-dimensional mapping assembly 62 receives beam segments 50,which as noted above lie in a first plane, and directs them to a firstparallel beam reflector assembly 64 including an array of beamreflectors 66. The mapping assembly 62 is formed with a plurality ofmapped sections 63 each of which is positioned in a suitable spatialorientation so that each beam segment 50 output by AOD 30 which impingeson a given mapped section 63 is directed to a corresponding beamreflector 66, to which it is mapped.

Each beam reflector 66 is set in a suitable adjustable holder enablingits spatial orientation to be independently adjusted respective of otherbeam reflectors 66. In accordance with an embodiment of the invention,the array of reflectors 66 is arranged to direct the beam segments 50received from mapping assembly 62 along beam paths 51. It is noted thatat least some, and in the embodiment seen in FIG. 1A all, of the beampaths 51 are vertically displaced relative to the plane along which beam23 propagates. However all of the beam paths 51 generally maintain aparallel orientation between reflector assembly 64 and deflectorassembly 52. Thus, the beam segments 50 propagate along parallel beampaths 51 to reach locations lying in a plane that is outside the planethrough which beam 23 propagates.

Thus, in an embodiment of the invention as seen in FIG. 1A, beforeimpinging on variable deflector assembly 52, downstream of reflectorassembly 64, the beam paths 51 each pass through an array of zoom lenses68 providing a zoom functionality to control a cross sectional diameterof a beam segments 50, an array of beam shaping lenses 70 providing abeam shaping functionality, and an array of independently controllablebeam focusing lenses 72, providing an independent focusing functionalityfor beam segments 50 in any of the beam paths 51. Each of the beam paths51 reaches a corresponding beam steering module 54 in variable deflectorassembly 52. Beams 50 reaching a steering module 54 are independentlysteered to address independently selectable locations 13, on substrate14, by reflecting elements 56.

In the embodiment seen in FIG. 1A the spatial orientation of eachreflecting element 56 is independently controlled by a positioningdevice, including, for example, at least three piezoelectric positioners58 arranged in a star-like arrangement operative to in the directionsindicated by arrow 59. Suitable piezoelectric positioners are describedin copending U.S. patent application Ser. No. 10/170,212, filed Jun. 13,2002 and entitled “Multiple Beam Micro-Machining System and Method”, thedisclosure of which is incorporated by reference in its entirety.

The zoom functionality may be provided, for example, by moving the arrayof zoom lenses 68, in which a zoom lens is provided for each beam path51. While such an arrangement is preferred because the respective zoomlenses may be smaller and less expensive, one or more zoom lensesreceiving beams propagating all, or any of several, beam segments 50 maybe employed. Typically the lenses in zoom lens array 68 are movedtogether to ensure that all beam segments 50 generally have the samediameter. In an embodiment of the invention, however, a differentialzoom may be applied such that some beams are zoomed by a greater orlesser zoom factor than other beams.

The array of beam shaping lenses 70 provides a beam shapingfunctionality, for example energy profile shaping. This shapingfunctionality may be provided using, for example, refractive ordiffractive optical elements, as known in the art. In accordance with anembodiment of the invention, different beam shaping attributes areprovided by laterally displaced overlapping sub-arrays of lenses or beamshaping elements. Thus, as seen in FIG. 1A, each beam segment 50 passesthrough one of four side by side optical elements. For each beam path51, a given first beam shaping function is provided to a beam 50 by afirst optical element, a second beam shaping function is provided to abeam 50 by a second optical element, a third beam shaping function isprovided to a beam 50 by a third optical element, and a fourth beamshaping function is provided to a beam 50 by a fourth optical element.By suitably moving a holder holding all of the elements in array 70, agiven type of optical element is suitably positioned with respect toeach of beam paths 51 to provide a desirable beam shaping function toeach beam segment SO passing along a path 51. In the example shown, itis seen for example, that beam segments 50 pass through a second of thefour beam shaping elements.

It is a feature of the present invention that the array of independentlycontrollable beam focusing lenses 72 includes a plurality of focusingmodules 74, each focusing module focusing a beam segment 50 passingtherethrough. Each focusing module 74 includes at least one movable lens76 that is operated independently of corresponding movable lenses 76associated with other focusing modules 74. Each beam segment 50 issteered to a selectable location 13 by the beam steering module 54 andis focused onto substrate 14 at the selectable location 13,independently of other beam segments 50. This independent focusingfeature, for example, compensates for different focal distances betweenthe focusing module 74 and the selectable location whereat the beamsegment 50 impinges on substrate 14. The different focal distances mayresult, for example, because of beam steering to locations 13 that areat different distances. Consequently, each beam segment 50 can beoptimally focused onto the selectable location 13 on substrate 14independently of other beam segments 50, and several beam segments 50can each be simultaneously optimally focused to corresponding selectablelocations 13.

It is noted that although the zoom lenses, beam shaping lenses, focusinglenses and beam steering modules are depicted in FIG. 1A as beinggrouped into separate functional assemblies, such grouping has been donemerely to simplify description of the key teaching points of theinvention. In actuality, the respective zoom, beam shaping, beamfocusing and beam steering functionalities may be provided by anysuitable grouping or arrangement of optical components, as would beapparent to a person skilled in the art of optical design. Thus for thesake of simplicity, any suitable combination or arrangement of opticalcomponents providing at least an independent beam focusing and beamsteering functionality for each beam 50 may be referred to as a laserbeam module.

In accordance with an embodiment of the invention, as seen for examplein FIG. 1A, the number of focusing modules 74 corresponds to the numberof beam paths 51, and exceeds the number of beam segments 50 that isoutput from AOD 30 in response to a given laser pulse 24. This increasednumber of focusing modules 74 as compared to the number of beam segments50 provides a redundancy in the number of focusing modules 74. While afirst set of focusing modules 74 is operative to independently focuseach of beam segments 50 output by AOD 30 and steered to a first set ofselectable locations 13, the movable lenses 76 in at least one of theother redundant focusing modules 74 are each moved into a new focusposition. Likewise, at least some of the corresponding steering modules54 are moved to a corresponding new position.

The new focus positions are suitable to focus corresponding beamsegments 50 from a subsequent laser pulse 25, as steered to a secondgroup of selectable locations 78. Thus, during the subsequent pulse 25the acoustic wave 38 in AOD 30 splits beam 23 into different beamsegments and deflects the resulting different beam segments 50 so thatthey pass through other focusing modules 74. The other focusing modules74 are now suitably configured to deliver the resulting different beamsegments 50, in focus, to the second group of selectable locations 78 onsubstrate 14.

It is noted that AOD 30 has a cycle time which is shorter than the timeinterval between consecutive pulses 24 and 25 of laser beam 22. In otherwords, the time required to reconfigure the acoustic wave 38 in AOD 30to comprise a different composition of frequencies when impinged upon bythe laser pulse 25, so as to change at least one of the number of beamsegments 50 and the respective directions thereof upon output from AOD30, is less than the time separation between consecutive pulses 24 and25 in beam 22. Consequently, the number of beam segments 50 and thedirection, θ_(n), of each of beam segment 50 can be changed, thereby toselect corresponding pairs of beam focusing modules 74 and steeringmodules 54, in less time than the time interval separating pulses 24 and25. A preferred embodiment of an AOD 30 outputting a selectable numberof beam segments 50, and controlling a direction of each beam segment50, is described hereinbelow in greater detail with reference to FIGS.3A-3C.

In contrast to the cycle time of AOD 30 being faster than time intervalsbetween pulses 24 and 25 in beam 22, the respective cycle times of thebeam steering modules 52 and the beam focusing modules 74 typically areslower than the time intervals between pulses 24 and 25 in beam 22. Thismeans that the time interval required to reposition the reflectorelement 56 in the beam steering module 54 or to move a movable lens 76in the focusing module 74 is greater than the time interval betweenconsecutive pulses 24 and 25. However, because the acoustic wave in AOD30 can be reconfigured in less time than the time interval betweenpulses 24 and 25, and because of the redundancy in focusing modules 74and beam steering modules 54, the AOD 30 can be used to select pairs offocusing modules 74 and beam steering modules 54 (namely laser beammodules) that were suitably repositioned during one or more of theprevious pulse intervals.

One benefit of the redundancy in focusing modules 74 and beam steeringmodules 54 is that it enables an optimum utilization of pulses 24 and 25in beam 22. While some focusing modules 74 and beam steering modules 54are actively steering beam segments 50 associated with the first pulse24 (or first set of pulses), other unused, i.e. redundant, focusinglenses 76 and corresponding reflector elements 56 may be repositioned sothat subsequent beam segments 50 passing through their correspondingfocusing modules 72 and steering modules 54 will be delivered in focusto different selectable locations 78. By reconfiguring an acoustic wave38 in the time interval between pulses 24, the AOD 30 is thus used toselect suitably positioned focusing modules 74 and beam steering modules54 to deliver focused beams to independently selectable locationswithout missing pulses. In accordance with a preferred embodiment of theinvention, this repositioning and selection process is performedsimultaneously for a plurality of beams.

It is noted that a feature of above described arrangement is the absenceof intervening f-θ optics, or other scan optics, between the beamsteering modules 54 in the variable deflector assembly 52 and substrate14. Together, beam segments 50 passing through the collection focusingmodules 74 and steering modules 54 cover a target area on substrate 14that is larger than a sub-target area associated any one pair of afocusing module 74 and beam steering module 54.

Since no intervening f-θ lens is provided downstream of the variabledeflector assembly 52, in the system seen in FIG. 1A the focus of eachbeam segment 50 at substrate 14 is maintained by independently focusingthe beam segments 50 upstream of beam steering modules 54. Withoutupstream focusing before the beam steering modules 54, a beam segment 50may not be in focus when delivered to at least some selectable locations13 on substrate 14. Loss of focus results, for example, because the beamsegments 50 typically have a finite and small acceptable focus range.Consequently, the pivoting of reflector 56 in steering modules 54results in a curvature of an uncompensated in-focus field, as describedhereinbelow. Thus at some selectable locations on the generally flatsurface 17 of substrate 14 there may be a sufficient increase indistance to cause a loss of focus.

Optionally, in accordance with an embodiment of the invention, the focuscompensation functionality may be provided at the suitable beam steeringmodule 54, avoiding an upstream focusing module. In such configurationthe beam focusing modules 54 are configured to provide a complex spatialpositioning operative to simultaneously steer beam segments 50 bypivoting a reflector element 56 and to extend or retract, to shorten orlengthen the optical path, to compensate for focus changes resultingfrom the pivoting.

The following is a simplified general description of the operation andfunctionality of system 10: An acoustic wave 38 is generated in crystal34 in synchronization with the pulses 24 and 25 of beam 22. The acousticwave 38 is propagated so that a desired acoustic wave structure ispresent in crystal member 34 at the time a first laser beam pulse 24impinges thereupon to split beam 23 into beam segments 50. Therespective directions of the output beam segments 50 are independentlycontrolled as a function of the frequencies in acoustic wave 38.

Typically, acoustic wave 38 will have several different frequencies, forexample, at various spatial segments along its length in crystal 34. Thenumber of beam segments 50, and their respective directions ofdeflection, are controlled by changing the frequencies in acoustic wave38. In accordance with an embodiment of the invention, the cycle time ofAOD 30 is sufficiently fast such that the acoustic waves 38 can bedynamically reconfigured between pulses 24 and 25 to selectably changethe direction of deflection of beam segments 50 between pulses 24 and25, without skipping pulses or loosing energy. It is noted that anacoustic wave having a wave structure suitable to split beam 23 andselectable direct each of the resulting beam segments needs to begenerated for each of the pulses 24 and 25.

Each beam segment 50 is deflected at a selectable angle θ_(n), that is afunction of the frequency or frequencies of the acoustic wave 38.Because the angles of deflection are relatively small, beam segments 50preferably pass through one or more angle expander lenses 60. The beamsegments 50 impinge on a selected mapped section 63 of mapping assembly62. Each beam segment 50 is directed by an appropriate mapped section 63to a corresponding reflector element 66 in parallel beam reflectorassembly 64. Each reflector element 66 is suitably tilted to reflect abeam segment 50 along a generally parallel beam path 51. Downstream ofthe reflector assembly 64, each beam segment 50 preferably passesthrough a zoom lens in the array of zoom lenses 68, a beam shaping lensin the array of beam shaping lenses 70, and a focusing module 74 in thearray of independently controllable focusing lenses 72 to impinge on acorresponding beam steering module 54. Each beam segment 50 is thenindependently steered by a corresponding beam steering module to impingeon substrate 14 at a selectable location 13. The selectable locations 13may be selected randomly.

In accordance with an embodiment of the invention, AOD 30 operates at aduty cycle which generally is faster than the pulse repetition rate oflaser beam 22. However, the deflection provided by AOD 30 is relativelylimited in that it deflects beam segments 50 by relatively small anglesof deflection, and in that all of beam segments 50 are output in thesame plane.

Conversely, the cycle time required to suitably position movable lenses76 in focusing modules 74 and reflector elements 56 in beam steeringmodules 54 typically is greater than the time separation betweenadjacent pulses 24 and 25 defining laser beam 22. Since each reflectorelement 54 may be tilted over a relatively large range of angles,preferable in 2-dimensions, a laser segment 50 impinging on thereflector element 54 may be delivered to cover a relatively largespatial region. It is noted however, that in accordance with anembodiment of the invention, the spatial region addressed by a beamsegment 50 is relatively large, typically in the order of 100×100 mm. Inaccordance with an embodiment of the invention, the distance betweenvariable deflector assembly 52 and substrate 14 is sufficiently large tomaintain an acceptably low degree of telecentricity, typically in theorder of less than about 3°.

In accordance with an embodiment of the invention, each of reflectorelements 56 is sufficiently tiltable so that reflector elements 56 inadjacent beam steering modules 54 are operable to deliver beam segments50 to selectable locations in mutually, at least partially, overlappingregions on the surface of substrate 14. Optionally, the regions merelyabut one another, but do not overlap. As a reflector element 56 istilted into a new spatial orientation, the movable lens 76 in acorresponding focusing module 74 is correspondingly moved to focus abeam segment 50 passing therethrough onto substrate 14. The respectivemovements of beam steering modules 54 and focusing modules 74 iscoordinated to ensure that all of the plurality of beam segments 50 thatimpinge on substrate 14 are focused, irrespective of any differences inthe respective lengths of the respective optical paths.

After completing micromachining operations in a first region covered bybeam steering modules 54, substrate 14 and apparatus 10 are mutuallydisplaced so that beam steering modules 54 covers a second region onsubstrate 14. Upon completion of all desired micromachining operations,substrate 14 is delivered to a subsequent processing stage in anelectrical circuit manufacturing process, for example an etchingprocess.

In accordance with an embodiment of the invention, the number ofsteering modules 54 and the number focusing modules 74 in assembly 52exceeds the number of beam segments 50 into which laser beam 23 is splitby AOD 30. During an initial time interval, beam segments 50 impinge ona first portion of the beam steering modules 54 and a first portion offocusing modules 74, but not on other, redundant, steering modules 54and focusing modules 74. The initial time interval is also used toreposition the remaining, redundant, beam steering modules 54 andfocusing modules 74 which do not receive a beam segment 50 during theinitial time interval.

During a subsequent time interval between next adjacent pulses 24 and25, beam segments 50 are deflected by AOD 30 to impinge on at least someof the beam steering modules 54 and focusing modules 74 which did notreceive beam segments 50 during a previous time interval. The beamsteering modules 54 and beam focusing modules 74 employed in thesubsequent time interval, having been repositioned in the previous timeinterval, are now suitably repositioned to deflect corresponding beamsegments 50 onto the substrate 14. During the subsequent time intervalat least some of the beam steering modules 54 and focusing modules 74that are not impinged on by a beam segment 50, possibly including beamsteering modules 54 and focusing modules 74 that were used in theprevious time interval, are repositioned for use in a further timeinterval. This process of repositioning beam steering modules 54 andfocusing modules 74 that are not used during a given time interval isrepeated. It is appreciated that in accordance with an embodiment of theinvention, beam segments 50 will typically be steered to the samelocation during several pulses, until the micromachining operation iscompleted at that location. Only after completion of the micromachiningoperation will the beam segment 50 be redirected by AOD 30 to adifferent pair of focusing modules 74 and beam steering modules 54 toperform a micromachining operation at a new selectable location 78.

Stated generally, it may be said that concurrent to beam segments 50from a first laser pulse impinging on selected focusing modules 74 andbeam steering modules 54, other focusing and beam steering modules areconcurrently repositioned to receive beam segments 50 from subsequentbeam pulses.

Typically the time interval required to reposition a reflector element56 in a beam steering module 54, or to move a movable lens 76 in afocusing module 74, is in the order of between about 2-20 milliseconds,corresponding to between about 40-400 pulses of a 20 KHz Q-switchedlaser. This relatively long period, which exceeds the time intervalbetween laser pulses 24 and 25, is used to ensure stabilized beampointing and beam focusing accuracy. Additionally, the use of multiplebeam steering modules 54 and multiple focusing modules 74 ensures aredundancy which minimizes the loss of pulses from moving movable lenses76 to focus beam segments or from repositioning reflectors 56 to steerthe beams. It is appreciated that in order to increase the speed of theapparatus 10, and to provide a controlled dosage of energy in each beamsegment 50, it may be necessary or desirable to have more than one beamsegment 50 simultaneously impinge on the surface of substrate 14 at thesame location. In such an arrangement, multiple beam segments 50 areeach individually deflected to impinge on separate focusing modules 74and beam steering modules 54, and the respective beam steering modulesare each oriented to direct the beam segments 50 to impinge on substrate14 at the same location.

Reference is now made to FIGS. 2A-2C which are simplified side viewillustrations showing operation of a an array of independentlycontrollable beam focusing lenses 720, corresponding to a portion of thearray of independently controllable beam focusing lenses 72 in theapparatus of FIG. 1A, and an array of independently controllable beamsteering modules 540, corresponding to a portion of the variabledeflector assembly 52 in the apparatus of FIG. 1A, in three differentoperative orientations. Array 720 includes three independentlycontrollable focusing modules 742, 744 and 746 respectively. Eachfocusing module includes an independently movable focusing lens,designated by reference numerals 762-778 respectively. Array 540includes three independently beam steering modules 542, 544 and 546respectively. Each beam steering module includes an independentlymovable reflector element. An assembly including a beam focusing moduleand a corresponding beam steering module operating in coordination maybe considered a laser beam module, designated by reference numeral 800.

Beam paths, generally designated 510, are shown passing through each offocusing lenses 742, 744 and 746 and impinging on the reflector elementof a corresponding beam steering module 542, 544 and 546. In FIGS. 2A-2Conly one beam segment, designated by a reference numeral 502, 504 and-506 is shown in each of FIGS. 2A, 2B and 2C, respectively, 2C asoccupying a beam path 510. This excess of focusing modules and beamsteering modules relative to beam segments 502, 504 and 506 correspondsto a redundancy of focusing modules and beam steering modules, asdescribed hereinabove with respect to FIG. 1A. The empty beam paths,designated by a reference numeral 512-522, are shown as broken lines,while the beam segments 502-506, are shown in each of FIGS. 2A-2C as asolid line. Each of the beam segments 502, 504 and 506 impinges on asubstrate 140, corresponding to substrate 14 in FIG. 1A, at a randomlyselectable location.

In FIGS. 2A-2C a first scale 580 is shown beneath focusing modules742-746. This scale includes 4 gradations and indicates a relativeposition of independently movable lenses 762-778 in focusing modules742-746 for focusing beam segments 502, 504 and 506 onto substrate 140.

A second group of scales 590, each including 7 gradations (0±3),indicates a location of beam segments 502-506 on substrate 140, within arange of possible selectable locations. The number of gradations shownin the scales 580 and 590 in FIGS. 2A-2C is arbitrary. The number ofgradations seen in scales 580 and 590 has been chosen for clarity andsimplicity in teaching the invention. In actuality, beams 502-506 may bepositioned at any number of a greater or lesser number of possibleselectable locations on substrate 140, and lenses 762, 764 and 766 mayhave a corresponding greater or lesser number of possible positions asnecessary to focus a beam to possible selectable locations. Moreover,inasmuch as FIGS. 2A-2C are front views, it is noted that the selectablelocations typically are located in a two dimensional area on substrate140, and that, accordingly, steering modules 542-546 are operable tosteer beam segments 502-506 to any corresponding selectable locations inthe two dimensional area.

The centermost location 0 on scale 590 corresponds to the shortestoptical path between a focusing module 742-746 and substrate 140,passing via a beam steering module 542-546. As a beam deviates from thecentermost location 0 in any direction, the length of the optical pathto the surface of substrate 140 increases. A curvature in theuncompensated in-focus field is schematically shown by curves 780, whichgenerally correspond to an equidistant optical path from lens modules742-746, using the centermost location 0 as a point of reference.

In FIG. 2A, which corresponds to an operational orientation during thefirst pulse 24 of a laser beam 20 (FIG. 1A), beam segment 502 isreflected by the suitably tilted reflector element of steering module544 to address the centermost location 0. Inasmuch as the optical pathto the centermost location is the shortest optical length of anyselectable location addressable by beam segment 502, lens 764 issituated at position 0 (as indicated by scale 580) in focusing module744 to focus beam 502 onto substrate 140.

At that moment in time represented by FIG. 2A, steering module 542 isoriented to steer beam path 512 to address location −2 on substrate 140.Lens 762 is located at position 2 in focusing module 742 such that abeam segment passing through focusing module 742 along beam path 512would be focused onto substrate 140 at location −2. Steering module 546is oriented to steer beam path 514 to address a location 1 on substrate140. Lens 766 is located at position 1 in focusing module 746 such thata beam segment passing through focusing module 746 along beam path 514would be focused on substrate 140 at location 1. It is noted that thecorresponding positions of the focusing lenses 762, 764 and 766 in thefocusing modules 742-746 correspond to an absolute value of thedeviation, in any planar direction, of a beam path from the centermostlocation 0 on substrate 140. Although the respective lens positions, asindicated by gradations in scale 580, are shown as having a lineardistribution, it is also noted that in actuality the distribution oflens positions may be uniformly linear or non-linear.

In FIG. 2B, which corresponds to an operational orientation during thesecond pulse 25 of the laser beam 22 (FIG. 1A), beam segment 504 isreflected by the suitably tilted reflector element of steering module546 to address the selectable location 1. Lens 772 is situated atcorresponding position 1 in focusing module 746 to focus beam 504 ontosubstrate 140 via the focusing module 546 at selectable location 1. Itis noted that beam steering module 546 and focusing module 746 have notmoved respective of their positions as depicted in FIG. 2A.

At the moment in time represented by FIG. 2B, steering module 542 hasmoved independently of steering modules 544 and 546 and is now orientedto steer beam path 516 to address centermost location 0 on substrate140. Lens 762, which has moved independently of lenses 764 and 766, islocated at position 0 in focusing module 742 such that a beam segmentpassing through focusing module 742 along beam path 516 would be focusedon substrate 140 at location 0.

Steering module 544 has also moved, relative to its orientation in FIG.2A, and is now oriented to steer beam path 518 to address location −1 onsubstrate 140. Lens 764, which has moved independently of lenses 762 and766, is located at position 1 in focusing module 744 such that a beamsegment passing through focusing module 744 would be focused onsubstrate 140 at location 1.

In FIG. 2C, which corresponds to an operational orientation during athird pulse of a laser beam 20 (FIG. 1A), beam segment 506 is reflectedby the suitably tilted reflector element of steering module 542 toaddress the selectable location 3. Lens 762 is situated at correspondingposition 3 in focusing module 742 to focus beam 506 onto substrate 140at selectable location 3. Here it is noted that beam steering module 542and focusing lens 762 in focusing module 742 have been moved respectiveof their corresponding positions as depicted in FIGS. 2A and 2B.

At that moment in time represented by FIG. 2C, steering module 544 hasmoved independently of steering modules 542 and 546 and is now orientedto steer beam path 520 to address location −2 on substrate 140. Lens764, which has moved independently of lenses 762 and 766, is located atposition 2 in focusing module 744 such that a beam segment passingthrough focusing module 744 along beam path 520 would be focused onsubstrate 140 at location −2.

Steering module 546 has also moved, relative to its orientation in FIG.2B, and is now oriented to steer beam path 522 to address centermostlocation 0 on substrate 140. Lens 768, which has moved independently oflenses 762 and 764, is located at position 0 in focusing module 746 suchthat a beam segment passing through focusing module 746 would be focusedon substrate 140 at location 0.

From the foregoing, it is thus appreciated that focusing lenses 762, 764and 766 in focusing modules 742-746 are moved independently of eachother but in coordination with a changing orientation of beam steeringmodules as needed to steer beam segments to desired locations. Thisensures that a beam segment remains in focus on substrate 140,irrespective of an increase or decrease in the length of an optical pathas a result, for example, of curvature in an uncompensated in-focusfield resulting from beam steering. Focus compensation values, namelythe respective positions of a focusing lens in a focusing module for agiven spatial orientation of a corresponding beam steering module toaddress a selectable location on substrate 140, may be stored, forexample, in a look up table.

Moreover, inasmuch as the processing of a given location on a substratemay continue over the duration of several pulses, for example during thedrilling of a via in a printed circuit board substrate, an optical pathmay increase in length requiring further focus adjustment. Such changein optical length may be compensated by moving the correspondingfocusing lens 762-768 during drilling in order to optimize focusing.Optionally, an active autofocus device may be provided to measure theactual length of a beam path and adjust the location of a focusing lensaccordingly. This may also be beneficial, for example, to compensate forheight deviations in the surface of a substrate, which may not be,necessarily, uniformly flat.

Optionally, instead of providing a focus compensation functionality bymoving movable lenses 762-766, a focus compensation functionality may beprovided by suitably extending or retracting beam steering modules 542,544 and 546. Such extending or retracting compensates for changes in thelength of the optical path resulting, for example, from pivotingreflectors 56 (FIG. 1A), or from changes in the depth of a drilled hole.One way to accomplish such focus compensation would be to provide apiezo-electric activator (not shown) operative to suitably extend orretract beam steering modules 542-546 as a unit. Such extension orretraction of the beam steering modules 542, 544 and 546 may affectoptical path geometry to an extent that it is necessary to make minuteadjustments to the angular orientation of the reflector 76 in order toaddress a desired location.

Reference is now made to FIGS. 3A-3C which are simplified schematicillustrations of an AOD 300 suitable for use in the system of FIG. 1A inaccordance with an embodiment of the invention. AOD 300 generallycorresponds to AOD 30 in FIG. 1A. AOD 300 includes a transducer element320 and a translucent crystal member 340 formed of quartz or othersuitable crystalline material, such as fused silica. A control signal,such as RF signal 360, drives transducer element 320 to cause anacoustic wave, generally designated reference numeral 380, to propagateacross crystal member 340. The control signal 360 is provided, forexample, by an RF modulator 400 in operational communication with theDDS 42 and the system controller 44 as seen, for example, in FIG. 1A.

It is a feature of AOD 300 that by changing one or more characteristicsof acoustic wave 380 propagating through the crystal member 340 inresponse to a control signal, an input laser beam 220 can be dynamicallysplit into n beams, where n≧1, and the output direction of eachresulting output beam segment 500 can be independently controlled as afunction of the acoustic wave frequency. It is noted that in FIGS.3A-3C, n corresponds to 5 beams. This number n of output beams isarbitrary and AOD 300 can be readily adapted to output a differentnumber of beams as required by a given application.

In accordance with an embodiment of the invention, a laser beam 220impinges on crystal member 340 at a given preselected location 342. Inan acousto-optical deflection device, the efficiency at which a beam isdeflected by acoustic wave 380 in the deflector 300 is governed by theacoustic amplitude of the wave. Thus, as seen in FIG. 3A, when asuitably high power acoustic wave portion 382 is located at preselectedlocation 342, substantially all of input beam 220 is deflected as anoutput beam segment 502.

As seen in FIG. 3B, an acoustic wave is generated such that at themoment that beam 220 impinges on the crystal member 340 at preselectedlocation 342, no acoustic wave is present at preselected location 342.This is accomplished by suitably timing control signal 360. As a result,beam 220 passes through crystal member 340 substantially without beingdeflected. The pass-through beam 222 is reflected by a set of reflectors224, 226 and 228 oriented to recirculate the pass-through beam 222 to anarray of beam splitters 230 operative to output a given number of beamsegments, each of which is passed to the AOD 230 at other preselectedlocations 232. In accordance with an embodiment of the invention, passthrough beam 222 is passed through optics 234, operative, for example,to reshape the pass through beam 222, for example to recollimate thebeam, prior to being split and passed through the other preselectedlocations 232 in AOD 300.

It is seen that the array of beam splitters 230 includes a firstreflective surface 235 having a plurality of partially reflectiveregions located adjacent a fully reflective surface 236. Pass throughbeam 222 enters the array of beam splitters 230 and impinges on a firstpartially reflective region 238 configured to pass 1/(n−1)^(th) ofoutput beam 222, wherein n is the total number of beams that can beoutput by AOD 300 (for example, in the embodiment seen in FIG. 3B, n=5).The remaining fraction of the output beam 222 is reflected to the fullyreflective surface 236 and then re-reflected to a second partiallyreflective region 240 configured to pass 1/(n−2)^(th) of the beamimpinging thereon. The output beam is thus split in a cascadearrangement to form n−1 beam segments which are supplied to AOD 300 fordeflection.

In the embodiment of the invention seen in FIG. 3B, n=5. Beam splitter230 is operative to supply four beam portions 246, each generally havingthe same profile and having a generally mutually equivalent power level,to crystal member 340 at the other preselected locations 232. The firstpartially reflective region 238 thus passes 25% of output beam 222 andreflects 75% toward surface 236. The second partially reflective region240 passes 33.33% of the remaining portion of output beam 222 andreflects 66.67% toward surface 236. A third partially reflective region242 receives the remaining portion of the pass through beam 222, passes50% and reflects 50% toward surface 236. A final location 244 passes100% of the remaining portion of output beam 222.

Each of the beam portions 246 is supplied to crystal member 340 at acorresponding one of the other locations 232. An acoustic wave 380,having frequencies appropriate to independently deflect each output beamsegment 247 in a desired direction, is injected into the crystal member340 in a timed manner to be present at each of the other locations 232when the beam portions 246 impinge on crystal member 340. It is notedthat recollimation of pass through beam 222 and partial splitting andreflection by beam splitter 230 are designed to result in each of beams500 having a substantially uniform cross sectional configuration andenergy density.

The acoustic wave 380 is thus operative to output deflected beamportions 247, each portion being output at a selectable angle as afunction of the frequency of the acoustic wave 380 at the moment in timethat beam portions 246 interact with the acoustic waves 380, asdescribed with reference to FIG. 1A. It is noted that timing of theacoustic wave 380 is critical and needs to account for the length of thecrystal member 340 and the velocity of wave 380 in the crystal, so thatan acoustic wave having frequencies appropriate to independently deflecteach of beam portions 246 in desired selectable directions is present inthe crystal at appropriate respective other locations 232 for each pulseof beam 220.

Referring now to FIG. 3C, it is seen that beam 220 is split into fiveoutput beam segments 500. Beam 220 interacts with a relatively low poweracoustic wave (seen as having a low amplitude) at preselected region 342which is operative to deflect 20% of beam 220 and pass 80% as a reducedpower pass-through beam 223. The reduced power pass-through beam 223 isreflected by reflectors 224, 226 and 228 oriented to recirculate thereduced power pass-through beam 223 through the array of partial beamsplitters 230 operative to output a given number of beam segments, eachof which is passed to the AOD 300 at other preselected locations 232. Inaccordance with an embodiment of the invention, reduced power passthrough beam 223 is passed through optics 234, operative, for example,to reshape the reduced power pass through beam 223, for example torecollimate the beam, prior to its being split and passed through to AOD300.

The array of partial beam splitters 230 includes a first reflectivesurface 235 having a plurality of partially reflective regions locatedadjacent a fully reflective surface 236. Reduced power pass through beam223 enters the array of partial beam splitters 230 and impinges on afirst partially reflective region 238 configured to pass 1/(n−1)^(th) ofreduced power pass through beam 223, wherein n is the total number ofbeams that can be output by AOD 300. The remaining fraction of thereduced power pass through beam 223 is reflected to the fully reflectivesurface 236 and then re-reflected to a second partially reflectiveregion 240 configured to pass 1/(n−2)^(th) of the beam impingingthereon. The output beam is thus split in a cascade arrangement to formn−1 beam segments which are supplied to AOD 300 for deflection.

In the embodiment of the invention seen in FIG. 3C, n=5 and beamsplitter 230 is operative to supply four beam portions 246, each havinga generally equal power level, to crystal member 340 at the otherpreselected locations 232. The first partially reflective region 238passes 25% of reduced power pass through beam 223 and reflects 75%. Thesecond partially reflective region 240 passes 33.33% of the remainingportion of reduced power pass through beam 223 and reflects 66.67%toward surface 236. A third partially reflective region 242 receives theremaining portion of the reduced power pass through beam 223, passes 50%and reflects 50% toward surface 236. A final location 244 passes 100% ofthe remaining portion of reduced power pass through beam 223.

It is noted that in accordance with a preferred embodiment of theinvention all of the output beam segments 500 generally have the sameshape, profile, energy density and fluence among themselves. A fluenceproperty of the output beams segments 500 can be changed by changing thenumber of output beam segments 500, and the number of output beamsegments can be changed by changing the amplitude of a control signal,namely acoustic wave 380, at preselected location 342. As seen in FIGS.3B and 3C, each of the four or five beams have the same shape, profileand fluence. However, a fluence property of the output beams is changedif one, four or five beams are output.

In accordance with an embodiment of the invention, AOD 300 typically isoperated so that all of the beams among themselves are output to havegenerally a uniform fluence property. In a mode of operation outputtingfive beam segments 500, acoustic wave 380 is configured such that 20% ofbeam 223 is deflected at preselected location 342 and 80% is passedthrough as a reduced power pass-through beam 223. Optionally, however,the acoustic wave 380 may be configured to deflect a portion of beam 223at preselected location 342 that is greater or lesser than 20%.

For example, in some applications such as laser micromachining copperclad PCB substrates, beams having a greater fluence property arerequired to micromachine a copper cladding in comparison to anunderlying glass epoxy substrate. Typically micromachining copperrequires approximately 6× the power required to micromachine glass epoxysubstrate. The different power requirements for micromachining copperand epoxy substrate are accommodated by generating one or more firstbeam segments, for example one beam, each having an energy propertysuitable for micromachining copper and using that beam to micromachinecopper at plurality of locations. Subsequently, laser beam 220 isdivided into a greater number of beam segments by AOD 300, for examplefour or five beam segments depending on the energy requirements, eachsuitable for micromachining glass-epoxy substrate. The greater number ofbeam segments are then used to micromachine glass-epoxy substrate wherethe copper has been previously exposed.

In accordance with an optional embodiment of the invention, it may bedesirable to deflect at preselected location 342 substantially less than20% of beam 223, for example only 4%, and then divide the remaining 96%among the other four beam segments output from AOD 300. This results inthe beams having a non-uniform fluence among themselves. In thisexample, the 4% beam segment would be used to ablate glass-epoxysubstrate which can be performed relatively expeditiously. The remaining96% of beam 223 would then be divided into multiple beam segments, forexample four beam segments, each having 24% of the remaining totalenergy. Assuming that laser beam 220 is of sufficiently high power,these resulting beam segments would be suitable, for example, formicromachining a copper cladding.

It is appreciated that this mode of operation requires a laser sourcehaving a suitably high power output to simultaneously produce multiplebeams each sufficiently energetic to micromachine copper. Moreover, itassumes that a micromachining operation on glass epoxy can proceed at arate that is quick enough so that one beam is able to keep up with agreater number of beam segments simultaneously performing micromachiningoperations in copper cladding.

Alternatively, it may be desirable to output beams having a non-uniformfluence or energy density property by deflecting at preselected location342 substantially more than 20% of beam 223, for example about 60%. Theremaining 40% of the undeflected beam among the other four beam segmentsoutput from AOD 300 to generate beam segments having about 10% each ofthe initial energy. In this example, the 60% fraction of beam 223 isapplied to micromachine the copper cladding, and the remaining 4×10%beam segments are used to ablate glass-epoxy substrate. It is noted thatthe power of a laser source producing beam 220 and the number of beamsegments output by AOD 300, and their respective relative energies, maybe modified in order to optimize simultaneous micromachining of copperand substrate.

Thus by changing the power characteristic of acoustic wave 380 atpreselected region 342, the relative energy density or fluence of afirst beam segment 500 can be modified and balanced relative to thefluence of other beam segments. By factoring in the relative power of alaser beam 220 and then modifying the number of beam segments output byAOD 230, and the respective energy distribution between the output beamsegments, a micromachining system may be optimized to simultaneouslymicromachine copper cladding and substrate.

Reference is now made to FIG. 4 which is a flow diagram 600 of amethodology for manufacturing electrical circuits in accordance with anembodiment of the invention. The methodology is described in the contextof a process for forming micro vias in a multi layered printed circuitboard substrate having a metal foil layer overlaying a dielectricsubstrate.

The presently described methodology for manufacturing electricalcircuits employs a multiple beam micromachining device that is operableto steer a multiplicity of independently focused and independentlysteered beams operative to deliver laser energy to independentlyselectable locations on a surface.

In accordance with an embodiment of the invention, a dynamic deflectordevice, such as an AOD, is operable to selectably provide at least onemetal machining beam-segment. In an embodiment of the invention, a beamsplitting functionality is also provided by the dynamic deflector. Themetal-machining beam-segment has an energy density that is suitable toremove a portion of the metal foil layer, for example by ablation.

Each metal machining beam segment is dynamically deflected to a laserbeam module where it is independently focused and independently steered.Each laser beam module may include, for example, an independent focusinglens 74 passing the beam to a separate tiltable reflector element 56 asseen in FIG. 1A. The reflector element is suitably positioned so thatthe metal machining beam segment is steered to a selectable location ona PCB substrate whereat a portion of the metal foil is removed to exposethe underlying dielectric substrate.

While a metal machining beam is removing a portion of the metal foil ata first location, at least one other beam steering module which is notbeing presently used may be suitably repositioned to remove a portion ofmetal foil at other selectable locations in subsequent micromachiningoperations. A subsequent pulse will be deflected by the dynamic beamdeflector to impinge on a pre-positioned beam steering module operativeto direct a metal removing machining beam to a next location whereat aportion of the metal foil will be removed.

Removal of portions of the metal foil continues at selectable locationsuntil metal foil is removed at all of a desired plurality of locations,as necessitated by an electrical circuit design. These desired locationsmay include all of the locations to be micro-machined on the substrate,or a subset of all desired locations.

In a subsequent operation, the dynamic deflector device is operated tooutput at least one dielectric machining beam-segment having an energyproperty, such as fluence, that is different from the metal machiningbeam-segment. A beam splitting functionality may be provided byinjecting a suitable acoustic wave into an acousto-optical deflector,for example as described with respect to FIGS. 3A-3C. In accordance withan embodiment of the invention, a dielectric machining beam segment hasa lower fluence than a metal machining beam-segment. Fluence refers tothe beam's energy per unit area (joules/cm²). The energy property of thedielectric machining beam segment is suitable to remove a portion of thedielectric layer, for example by ablation, but is not suitable to removea portion of the metal foil. This reduced energy level may be achieved,for example, by dividing a laser beam into a greater number of beamsegments, for example as described with reference to FIGS. 3A-3C above.

In accordance with an embodiment of the invention, the respectivefluence characteristics of beam segments 50 (in FIG. 1A) are controlledby splitting a laser beam 22 into a suitable number of beam segments 50,and by maintaining the diameter of the resulting beam segments 50irrespective of the number of beam segments, for example using zoomoptics such as zoom lens array 68.

Each dielectric machining beam segment is passed to a laser moduleincluding focus compensation and beam steering functionalities.Independent focus compensation optics focus the beam at least as afunction of a location to be addressed on a PCB substrate to bemicro-machined, The beam is steered to that location by a beam steeringmodule associated with the laser beam module. The beam steering moduleis suitably positioned so that each dielectric machining beam segment issteered to a selectable location whereat a portion of the metal foil hasalready been removed, to expose the underlying dielectric layer. Adesired portion of the dielectric is then removed.

While one or more dielectric machining beams are removing portions ofthe dielectric at a first set of locations, beam focusing modules andbeam steering modules which are not being presently used may be suitablyrepositioned for removal of dielectric at other selectable locationsduring a subsequent operation. Thus, a subsequent pulse may be deflectedby the dynamic beam deflector to impinge on an already positioned beamfocusing module and corresponding beam steering device. Because areduced energy density is required to remove dielectric, beam 22 may bedivided into a greater number of dielectric machining beam segments,compared to metal machining beam segments, thus resulting in a greatersystem throughput for removing dielectric as compared to removing metalfoil. Optionally, by adjusting the amplitude of the control signal in anAOD as described with reference to FIGS. 3A-3C, the AOD maysimultaneously output one or more low fluence beams along with one ormore high density beams, and use the respective high fluence beam orbeams to micromachine copper and the low fluence beam or beams tosimultaneously micromachine a substrate material.

Removal of dielectric continues at selectable locations until thedielectric is removed for substantially all of the locations at whichmetal foil was previously removed. Once this operation is completed, asubstrate can be repositioned for micro-machining at a next subsequentportion thereof.

It is appreciated by persons skilled in the art that the presentinvention is not limited by what has been particularly shown anddescribed hereinabove. Rather the present invention includesmodifications and variations thereof which would occur to a person ofskill in the art upon reading the foregoing description and which arenot in the prior art.

1. Apparatus for delivering laser energy to a workpiece, comprising: atleast one laser energy source providing at least two laser beams; aplurality of laser beam steering modules arranged to selectably steersaid at least two laser beams to selectable locations on a target; and aplurality of laser beam focusing optical modules associated with saidlaser beam steering modules for focusing at least one of said at leasttwo laser beams onto said workpiece.
 2. Apparatus for delivering laserenergy to a workpiece as claimed in claim 1, wherein said plurality oflaser beam steering modules comprises a number of laser beam steeringmodules greater than said at least one laser beam, thereby to define atleast one redundant laser beam steering module.
 3. Apparatus fordelivering laser energy to a workpiece as claimed in claim 1, whereinsaid plurality of laser beam focusing optical modules comprises a numberof laser beam focusing optical modules greater than said at least onelaser beam, thereby to define at least one redundant laser beam focusingoptical module.
 4. Apparatus for delivering laser energy to a workpieceas claimed in claim 2, wherein said at least one laser beam can beselectably directed to a selectable laser beam steering module,, whereinsaid redundancy in said plurality of laser beam steering modulescompensates for a difference between said pulse repetition rate and acycle time of each of said laser beam steering modules.
 5. Apparatus fordelivering laser energy to a workpiece as claimed in claim 1, whereinsaid plurality of laser beam focusing optical modules comprises a numberof laser beam focusing optical modules greater than said at least onelaser beam, thereby to define at least one redundant laser beam focusingoptical module.
 6. Apparatus for delivering laser energy to a workpieceas claimed in claim 5, wherein said at least one laser beam can beselectably directed to a selectable laser beam focusing optical module,wherein said redundancy in said plurality of laser beam focusing opticalmodules compensates for a difference between a pulse repetition rate ofsaid at least one laser beam and a cycle time of each of said laser beamfocusing optical modules.
 7. Apparatus for delivering laser energy to aworkpiece as claimed in claim 1, wherein said laser energy source is apulsed laser energy source, wherein during a first pulse of said atleast one pulsed laser energy source, a first laser beam focusingoptical module is operative to focus a first pulsed laser beam onto saidworkpiece.
 8. Apparatus for delivering laser energy to a workpiece asclaimed in claim 7, wherein during said first pulse a redundant laserbeam focusing optical module is operative to be repositioned to aposition required to focus a subsequent pulsed laser beam onto saidworkpiece, said subsequent pulsed laser beam to be output during asubsequent pulse of said at least one pulsed laser energy source. 9.Apparatus for delivering laser energy to a workpiece as claimed in claim8, wherein said laser beam focusing module is located upstream of saidbeam steering module, said laser beam focusing module comprising atleast one movable lens to focus said pulse laser onto said workpiece.10. Apparatus for delivering laser energy to a workpiece as claimed inclaim 8, wherein said laser beam focusing module comprises at least oneactuator in said at least one laser beam steering module, said actuatoroperative to move a portion of said laser beam steering module along anaxis to compensate for changes in a length of an optical path as afunction of steering said at least one laser beam.
 11. Apparatus fordelivering laser energy to a workpiece as claimed in claim 1, whereinsaid at least one laser energy source is operative to provide aplurality of laser beams.
 12. Apparatus for delivering laser energy to aworkpiece as claimed in claim 1, wherein said at least one laser energysource is operative to provide a plurality of laser beams, and saidplurality of laser beam focusing optical includes an at least oneredundant laser beam focusing optical module respective of each laserbeam.
 13. Apparatus for delivering laser energy to a workpiece asclaimed in claim 7, wherein a cycle time for configuring a laser beamfocusing optical module to focus a laser beam onto said workpieceexceeds a time interval separating pulses of said at least one pulsedlaser source.
 14. Apparatus for delivering laser energy to a workpieceas claimed in claim 4, wherein said at least one pulsed laser energysource comprises a deflector selectably deflecting said at least onepulsed laser beam.
 15. Apparatus for delivering laser energy to aworkpiece as claimed in claim 7, wherein said at least one laser energysource comprises an acousto-optical deflector having cycle time that isless than a time interval between pulses of said pulsed laser source.16. Apparatus for delivering laser energy to a workpiece as claimed inclaim 15, wherein during an initial pulse of said pulsed laser energysource said deflector is operative to deflect an initial laser beam to afirst laser beam focusing optical module, and during a next pulse saiddeflector is operative to deflect a next laser output to a redundantlaser beam focusing optical module.